Home / SiteMap /  Japanese

 MSX-5000 series

This compact leak testing unit simultaneously performs a full automated pumping, gross, and fine leak detection for minute electronic components. This system is developed in order to meet the needs of development of leak testing technologies such as miniaturization, lighter weight, and higher sensitivity of electronic parts. It automatically inspects and evaluates every work part that is loaded into the system in sequential order.

• Objected Work : 3mm cubic SMD or smaller
• Sensitivity : Large leak to 10－9Pam3/sec
• Process Capability :

MSX-5065 (6ch) 2sec / 1 part (Processing for OK works)

MSX-5085 (8ch) 1.2sec / 1 part (Processing for OK works)

• Bombing Time : 60 minutes
• Neglect Time : 5 minutes (But Varies depending on the work internal volume.)
• Work Transporting Method: Tarts Feeder Supply(Optional)
• OK/NG Separate Drop Box (Corresponds to pallet transport stacking according to special specifications)

 MSH-5000 series

This compact gross/ fine leak testing system conducts full automated leak detection for gross/ fine leak testing of minute electronic components. It automatically inspects and

evaluates every work part that is loaded into the system in sequential order.

• Detection Sensitivity
• Gross leak test: Large leak to 10－4Pam3/sec
• Fine leak test: 10－5Pam3/sec to 5 x 10－9Pam3/sec
• Various Applications Using a Group Setting Function
• Data Communication Using a RS-232C (For every Channel)
• NG work is selected as gross leak NG work and (or) fine leak NG work.
• Processing Capability

MSH-5043(4ch): 3.0sec / 1 part (Processing for OK works)

MSH-5063(6ch): 2.0sec / 1 part (Processing for OK works)

MSH-5065(6ch): 2.0sec / 1 part (Processing for OK works)

• Work Transporting Method: Tarts Feeder Supply(Optional)OK/NG Separate Drop Box (Corresponds to pallet transportstacking according to special specifications)

 MH-5000 series

Designed exclusively for Fine Leak Tests capable of automatically processing fine leak tests collectively

• Process Capacity:

MH-50120 12ch 1.0sec/1part (when selecting acceptable parts)

• Test Parts Loading and Unloading Method:
• Parts are supplied via parts feeder unit (optional) Accepted parts and rejected parts are unloaded into separate boxes (Special models are available to sup port loading and unloading onto pallets, stacking works in tiers, etc.)

 MS-5000 series

This full automatic compact system conducts gross leak testing on minute electronic components.

• Detection Sensitivity:

FL-513(10－5Pam3/sec)

FL-515(5×10－6Pam3/sec)

• Various Applications Using a Group Setting Function
• Data Communication Using a RS-232C (For every Channel)
• Processing Capability

MS-5043(4ch): 2.5sec / 1 part (Processing for OK works)

Previous type- Employs FL-513

MS-5063(6ch): 1.5sec / 1 part (Processing for OK works)

Previous type- Employs FL-513

MS-5065(6ch): 1.5sec / 1 part (Processing for OK works)

Supersensitivity type- Employs FL-515

MS-5085(8ch): 1.0sec / 1 part (Processing for OK works)

Supersensitivity type- Employs FL-515

• Work Transporting Method: Tarts Feeder Supply(Optional)
• OK/NG Separate Drop Box (Corresponds to pallet transportstacking according to special specifications)

 MSH-500 series

This compact gross/ fine leak testing system conducts full automated leak detection for gross/ fine leak testing of minute electronic components. It automatically inspects and

evaluates every work part that is loaded into the system in sequential order.

• Detection Sensitivity:

Gross leak test: Large leak to 10－4Pam3/sec

Fine leak test: 10－5Pam3/sec to 5 x 10－9Pam3/sec

• Various Applications Using a Group Setting Function
• Data Communication Using a RS-232C (For every Channel)
• NG work is selected as gross leak NG work and (or) fine leak NG work.
• Processing Capability:

MSH-5043(4ch): 3.0sec / 1 part (Processing for OK works)

MSH-5063(6ch): 2.0sec / 1 part (Processing for OK works)

MSH-5065(6ch): 2.0sec / 1 part (Processing for OK works)

• Work Transporting Method: Tarts Feeder Supply(Optional)
• OK/NG Separate Drop Box (Corresponds to pallet transport stacking according to special specifications)

 MS-500 series  

These compact leak testing units may be applied to experimental use for device development, preliminary test for line introduction, sample testing, and retesting rejected parts; and integrate all functions that are necessary for measurement control programs including a timer, clamp devices, etc. Work type can be switched by changing capsules.